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Active vibration isolation table Product List

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Technical Document: "Why is Active Vibration Isolation Necessary?"

Technical Document: "Why is Active Vibration Isolation Necessary?"

Explain the reasons why active vibration isolation is necessary, the limitations of passive vibration isolation tables, the principles of active vibration isolation tables, and our corresponding product, the VAAV series.

= Content = 1. Limitations of Passive Vibration Isolation Tables 2. Principles of Active Vibration Isolation Tables 3. Features of VAAV 4. Vibration Isolation Effect of VAAV (Vibration Transmission Rate) 5. Damping Effect of VAAV (Response of the Base Plate to Stage Moving Loads) For more details, please contact us or download the catalog.

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  • Active vibration isolation table

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Seismion Active Vibration Isolation Table "Reactio pro"

Seismion Active Vibration Isolation Table "Reactio pro"

An application that is concerned with all vibrations!

The active vibration isolation table manufactured by Seismion is designed with high-sensitivity piezo sensors, non-contact voice coil actuators, and noise-free analog control circuits. It demonstrates excellent performance, particularly against low-frequency vibrations, through robust electrical feedback control, handling disturbances and vibrations without interrupting or stopping the isolation. With a pair of eight sensors and the manufacturer's proprietary actuators, it controls all six degrees of freedom (6DOF) motion. This active vibration isolation table is ideal for various applications where disturbances and vibrations are problematic, including semiconductor manufacturing, microscopy, interferometry, 3D printing, and various measurement and laboratory experimental uses.

  • Vibration and Sound Level Meter
  • Active vibration isolation table

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Technical Guidance: Precision Vibration System Products

Technical Guidance: Precision Vibration System Products

From passive vibration isolation to double active control! Patented equipment supporting fine technology in the nano era.

This document is a technical guidance for designers pursuing V-solutions together with our company. It includes the selection of vibration isolation systems using micro-vibration control technology tailored to the equipment, the configuration of pneumatic active micro-vibration control units, the system configuration of the α series, and variations of vibration control technology. We introduce a wide range of "precision vibration system products" from passive isolation to double active control. [Contents (excerpt)] ■ "Precision Vibration Systems" supporting fine technology in the nano era ■ Patent equipment that provides total support for micro-vibration environments ■ Selection of vibration isolation systems using micro-vibration control technology tailored to the equipment ■ Configuration of pneumatic active micro-vibration control units ■ Pneumatic active micro-vibration control unit α series *For more details, please refer to the PDF document or feel free to contact us.

  • Monitoring and Control Equipment
  • Vibration and Sound Level Meter
  • Active vibration isolation table

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